Electrical neuron stimulation holds promise for the treatment of several chronic neurological disorders, including spinal cord injury, epilepsy, and Parkinson’s disease. The implementation of ultrathin, flexible electrodes, that can offer non-invasive attachment to soft neural tissues, is a breakthrough technology for timely, continuous, programable, and spatial stimulations. However, to enable flexibility in neural electrodes, the conventional thick and bulky ceramic package is no longer applicable to soft electronics, which poses several technical issues such as device degradation and long-term stability. We introduce herein a new concept of long-lived flexible neural electrodes using silicon carbide nanomembranes as the Faradaic interface, and thermal oxide thin films as the electrical isolation layer. The silicon carbide (SiC) membranes were developed using a wafer-level chemical deposition process while thermal oxide was grown employing a standard and high-quality wet oxidation approach, which are scalable and compatible with industrial microelectronic technologies. Our experimental results showed excellent stability in the SiC/SiO2 hybrid system that can potentially last several decades with maintained reliable electrical properties in biofluid environments. We demonstrated the capability of our material system in stimulating peripheral nerves (i.e., sciatic nerve) in rat models, showing comparable muscle contraction response recorded from electromyogram (EMG) stimulation results to a gold-standard non-implanted nerve stimulation device. The design concept, scalable fabrication approach, and the multimodal functionalities in SiC/SiO2 flexible electronics open an exciting possibility for fundamental neuroscience studies as well as clinical neural stimulation-based therapy.