We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Qc = 4.33 × 107 , which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.

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No competing interests reported.
This is a list of supplementary files associated with this preprint. Click to download.
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Posted 16 Feb, 2021
On 10 Mar, 2021
Received 25 Feb, 2021
On 22 Feb, 2021
On 11 Feb, 2021
Invitations sent on 08 Feb, 2021
On 05 Feb, 2021
On 03 Feb, 2021
On 03 Feb, 2021
On 01 Feb, 2021
Posted 16 Feb, 2021
On 10 Mar, 2021
Received 25 Feb, 2021
On 22 Feb, 2021
On 11 Feb, 2021
Invitations sent on 08 Feb, 2021
On 05 Feb, 2021
On 03 Feb, 2021
On 03 Feb, 2021
On 01 Feb, 2021
We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Qc = 4.33 × 107 , which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.

Figure 1

Figure 2

Figure 3
No competing interests reported.
This is a list of supplementary files associated with this preprint. Click to download.
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