Figure 3 shows the simulated CGG capacitances of A-SC and GC SOI MOSFETs, with different lengths and lengths ratios and VDS = 50 mV. The maximum capacitances are about the same for each structure, as for the minimum capacitance the A-SC presents higher values. For devices with the same LHD, which are the devices with length of 0.667, 1 and 2.5 µm, as the length ratio increases the capacitance increases. The device with length of 0.625 µm has most of its channel as a lightly doped region, making the capacitance lower if compared to the device with same ratio (length of 2.5 µm). This show how important is the highly doped region to the capacitance values. Also, for devices with longer channel length, the presence of bumps on the transition from depletion to saturation can be seen better for both devices.
Figure 4 shows the simulated CGD capacitances of A-SC and GC SOI MOSFETs, with different lengths and lengths ratios and VDS = 50 mV. The minimum capacitance are about the same for all devices, independent of the lengths and lengths ratios. As for the maximum capacitance, GC devices presents a higher capacitance than the A-SC devices. The maximum capacitances for the GC devices reaches saturation at slightly later VGS, and the peak that occurs at a VGS close to the VT of MD is discrete for the A-SC, and prominent to the GC. After reaching the maximum value, the capacitance starts to decrease reflecting the change in the inversion charge density of the channel MD. As for the length ratio, as it increases the higher the capacitance.
Figure 5 shows the simulated CGS capacitances of A-SC and GC SOI MOSFETs, with different lengths and lengths ratios and VDS = 50 mV. The minimum capacitance for all devices are about the same. The maximum capacitance for the A-SC device, with LMS with the same length, the CGS are about the same, but looking closely as LMD/L ratio increases the lower the capacitance. For the GC device this behavior is opposite, as LLD/L ratio increases the higher the capacitance, and the variation of the capacitance is larger. The values of CGS from the A-SC device is smaller than the ones presented on the GC device. This shows how significant the depletion region closer to the drain is affected directly by the LMD, and since the A-SC devices has the intermediate region and its capacitance is the main component on CGG (this will be shown after on section IV), CGS is lower for these devices.
Figure 6 shows the simulated CGG capacitances of A-SC and GC SOI MOSFETs, with different lengths and lengths ratios and VDS = 1.5 V. The saturation occurs at later VGS, with the maximum capacitance being reached at VGS higher than the simulation as the depletion region near the drain increases, and therefore making the bumps smoother.
Figure 7 shows the simulated CGD capacitances of A-SC and GC SOI MOSFETs, with different lengths and lengths ratios and VDS = 1.5 V. With higher drain bias the variation of the capacitance on the A-SC increases, making more visible how it is higher as the length ration increases. The capacitance values of the A-SC becomes closer to the ones presented on the GC devices, but are still lower than the GC capacitance.
Figure 8 shows the simulated CGS capacitances of A-SC and GC SOI MOSFETs, with different lengths and lengths ratios and VDS = 1.5 V. For the A-SC device with higher drain bias, in saturation the variation of the capacitance is higher, making the decrease of the CGS as the length ratio increases in better seen. This is due to the increase of the CGD values due to the increase of depletion region of MD and how it affects MS.