Investigation of Work Coordinate System Setting in Ultra-Precision Machining Using Electrical Breakdown for Non-Conductive Materials

doi:10.21203/rs.3.rs-2847463/v1

Download PDF

Research Article

Investigation of Work Coordinate System Setting in Ultra-Precision Machining Using Electrical Breakdown for Non-Conductive Materials

https://doi.org/10.21203/rs.3.rs-2847463/v1

This work is licensed under a CC BY 4.0 License

Journal Publication

published 05 Oct, 2023

Read the published version in The International Journal of Advanced Manufacturing Technology →

You are reading this latest preprint version

The ultra-precision machine tool industry has been consistently improving to the point where machine tools with extreme thermal controls, vibration damping, and command resolutions of 0.1 nm are commercially available. As little research focus has been given to developing peripheral technologies, currently available work coordinate system setting methods are a bottleneck on the achievable accuracy of ultra-precision machine tools. One of the work coordinate system setting methods uses electrical breakdown. The electrical phenomenon occurs when a sufficiently large voltage difference is applied between two conductors. This phenomenon has been observed to have a linear relationship between the breakdown voltage and gap length at short gap lengths. Electrical breakdown is a capable work coordinate system setting with an accuracy of 100s nm. However, this method is limited to electrically conductive cutting tools and workpiece materials. This study proposes a work coordinate system setting method for ultra-precision machining based on electrical breakdown for non-conductive materials. In this study, a conductive thin film coating is applied to polycrystalline diamond cutting tools to facilitate electrical breakdown work coordinate system setting. With similar motivation, a modification method was tested to enable electrical breakdown work coordinate system setting on non-conductive workpiece materials. The modification method used a 50 nm thick platinum coating on the workpiece. This study also introduces a method for automatic work coordinate system setting using electrical breakdown and sensors built into the machine tool.

Measurement

Ultra-precision

Electrical breakdown

Tool setting

Non-conductive materials

The demand for higher quality and more precise manufacturing methods has been steadily increasing. Ultra-precision machining (UPM) is a subtractive manufacturing technology that is slowly gaining more industry attention as researchers and machine tool builders work to further increase the accuracy, usability, and accessibility of ultra-precision machine tools. UPM is often applied to applications where form accuracy and surface quality are critical such as precision optics, silicon wafers, high-precision gauge blocks, high-precision molds, and the biomedical industry [1–4]. However, the complexity of the systems, as well as the low material removal rates, difficult setup procedures, and high cost of the machine tools, makes UPM difficult to adapt to wider manufacturing applications.

Over the past several decades, significant research has gone into improving the performance, understanding the process characteristics and cutting mechanics, and expanding the application of ultra-precision machine tools. Schneider et al. reviewed the sustainability and feasibility of ultra-precision machining as a future manufacturing process [5]. Several authors have studied the wear mechanics in ultra-precision machining to improve the cutting performance and tool life of diamond cutting tools [6, 7]. However, little research has been conducted in the field of advancing peripheral technologies for ultra-precision machine tools such as work coordinate system (WCS) setting. The available accuracy for WCS setting methods is at least two orders of magnitude bigger than the accuracy of the machine tool. In conventional machining, spindle probes and tool probes are the most common way to set up the WCS by measuring the relative position of the workpiece and the geometry of the cutting tool [8]. The best of these probes has a repeatability of 0.5 µm. Combining the tool probe’s repeatability with the spindle probe’s repeatability, which can be 0.5 µm or greater, the combined repeatability is a minimum of 1 µm or more [9, 10]. This level of repeatability would be an unacceptable bottleneck to ultra-precision machine tools. To improve the WCS method using the spindle probe and tool probe, many researchers have proposed methods with various sensors. Acoustic emission (AE) sensing is a contact detection method that has been studied by several researchers [11–13]. The various AE contact detection methods achieved an accuracy of 1–2 µm. However, this contact detection method has some limiting factors. Unless the machine tool is isolated from its environment, the AE sensor could falsely be triggered from external noise. WCS setting via evanescent light is one of the most unique methods proposed for measuring the relative distance between the cutting tool and the workpiece surface [14]. Experimental results show a best-case scenario accuracy of approximately 400 nm, but this number does not represent a real-world application because a prism was used in place of a cutting tool [15, 16]. Popov et al. created a micro-milling contact detection method using electrical conductivity. They obtained an accuracy of ~ 3.0 µm and a repeatability of 0.5 µm using this method [17]. Accuracy was determined by comparing the contact detection position with the position measured by a touch probe. Bono et al. tested an optical tool setting method on a precision lathe [18]. It was found that the optical tool setting had a repeatability of ~ 1 µm and ~ 2 µm for 20x and 10x magnification lenses, respectively. Capacitance sensors are another non-contact device that can be used to measure distances [19]. Wang et al. used a ring-shaped fringe capacitance sensor to measure small distances with sub-micron precision [20]. However, this method had a high noise to signal ratio, which made the small distance measurements difficult. Maeng et al. demonstrated that electrical breakdown could be used as a WCS setting method. Tungsten carbide (WC) cutting tool and a cubic boron nitride (CBN) cutting tool with several workpiece material combinations were tested to show that electrical breakdown is a capable WCS setting method with an accuracy of 70 nm [21]. However, the method is only applicable to the conductive workpiece and tool materials because it uses the electrical phenomenon. The previous methods are limited in accuracy and repeatability, have complex and sensitive sensors, or both. Therefore, a more accurate and easier to use WCS setting method must be developed for UPM applications to further increase the usability of UPM technology. This study builds off the knowledge from past WCS setting research to develop a new WCS setting method based on electrical breakdown [21]. It is proposed that the electrical breakdown WCS setting method can be adapted for the use with non-conductive workpiece and cutting tool materials by applying a conductive film or using a precision reference block. This research will test the accuracy, repeatability, and reliability of the electrical breakdown WCS setting method by using Polycrystalline Diamond (PCD) cutting tools coated with an electrically conductive thin film in combination with various conductive and non-conductive workpiece materials. In addition, an automated WCS setting system will be designed and tested using electrical breakdown.

Electrical breakdown is an electrical phenomenon that occurs between two conductors and an insulating medium [22]. When a large enough voltage difference is applied between the two conductors, the electric field breaks down and the electrical resistance of the insulating layer is reduced. This leads the insulating medium to become ionized and results in current flow through the gap between the conductors. The popularization of electrical breakdown research dates back to the 1920’s when Loeb and Wagner tried to understand the principles of electrical breakdown in atmospheric air and in solid dielectrics [23, 24]. Paschen found that the voltage required to cause electrical breakdown between two conductors is a function of distance between the conductors and pressure in the insulating medium. J.S. Townsend further built upon Paschen’s work by developing the Townsend breakdown criterion, which mathematically describes how electrical breakdown occurs [25]. Paschen’s Law can be derived by combining Paschen’s early work with the Townsend breakdown criterion, as shown in Eq. (1)

$${V}_{b}=\frac{{B}_{p}pd}{lnln \left({A}_{p}pd\right)-lnln \left[lnln \left(\frac{1}{\gamma }+1\right) \right] }$$

where ${V}_{b}$ is the breakdown voltage, p is the pressure in the insulating medium, d is the distance between the conductors, and A, B and γ are coefficients related to the insulating medium. This equation can be used to calculate the breakdown distance for an applied voltage and a given insulating medium such as air.

Paschen’s Law was the primary model for calculating the breakdown voltage or breakdown distance until the 1950’s when researchers discovered that the model does not always hold true [26–28]. For very small gaps between the conductors, Boyle and Kisliuk found that the breakdown voltage decreases, as opposed to the exponential increase shown by Paschen’s Law [26]. In the past few decades, several other researchers have observed similar trends where Paschen’s Law does not hold true for small gaps. Slade et al. found that for electrical breakdown gaps less than 4 µm, a decreasing linear trend exists between breakdown voltage and gap length [29]. Eq. (2) represents the observed linear trend,

$${V}_{b}=Kd$$

where ${V}_{b}$ is the breakdown voltage, K is a constant determined by experimentation, and d is the gap between the conductors. Slade et al. reported a K value of 110 V/µm in air, 65 V/µm in air, and 97 V/µm in a vacuum. The similarity between the vacuum and air K values shows that both electrical breakdown conditions follow the same breakdown mechanism. Wallash and Levit reported a K value of 156 V/µm in air during a similar electrical breakdown test [30]. Torres and Dhariwal concluded that the variance between the breakdown voltage and breakdown gap relationships are caused by the shape and surface finish of the conductors rather than the material [28].

Experiments are conducted to evaluate the precision of the proposed method with coating non-conductive PCD cutting tools with a thin conductive film. A 5-axis ultra-precision machine tool (ROBONANO α-0iB, FANUC, Japan) was used for this study. This machine has a command resolution of 1 nm for each of the three linear axes and a 1 micro-degree command resolution for each of the two rotary axes. The machine tool is contained in a thermal enclosure that controls the air temperature at 23 ± 0.01 ℃ and is equipped with an internal vibration damping system to minimize environmental influences on the machine tool. The electrical breakdown circuit consists of a power supply, oscilloscope, and a resistor and capacitor (RC) circuit, as shown in Fig. 1 and Fig. 2 (a). The cutting tool is configured as the cathode due to metallic discharge from the anode to the cathode during electrical breakdown. In this configuration, cutting tool and conductive coating damage will be minimized.

The relationship between applied voltage and breakdown distance will be observed in addition to the resulting surface damage from electrical breakdown. All experiments are conducted with air as the insulating medium. Conductive coating materials, platinum (Pt) and gold (Au), are used in combination with oxygen-free high thermal conductive copper (OFHC), A360 brass, 6061 aluminum, and 7075 aluminum workpiece materials to understand the effect of anode and cathode materials on electrical breakdown. The experimental measurements are repeated at least 10 times for each voltage, conductive coating, and workpiece material combination. To avoid external influencing factors, all workpiece substrates are prepared in a similar manner. Using a 0.5 mm nose radius PCD cutting tool, as shown in Fig. 2 (b), the workpiece is scribed with a 0.001 mm stepover to produce a small square with a surface roughness of ~ 10 nm Ra. The fine surface finish eliminates uncertainty from a rough surface and provides an ideal surface for electrical breakdown. After preparing the workpiece, the electrical breakdown circuit is assembled.

Many popular UPM cutting tool materials are non-conductive such as polycrystalline diamond (PCD) and single crystalline diamond (SCD). A way to modify the popular non-conductive cutting tool materials must be created to make them compatible with the electrical breakdown WCS setting method. In this experiment, binderless nano-polycrystalline diamond (nPCD) cutting tools with a 0.5 mm nose radius and 0° rake angle were made electrically conductive by means of thin film deposition on the surface and cutting edge of the tool. A sputtering machine (EM ACE600, Leica) was used to apply thin film coatings of 40 nanometers thick to the PCD cutting tools. Secondary verification of the film thickness was conducted using an atomic force microscope (AFM). Two coating materials on the cutting tools: platinum and gold were tested. Platinum was chosen due to its superior adhesion strength, chemical resistance, and good electrical conductivity. Gold was chosen as a comparison due to its superior electrical conductivity and good adhesion. Figure 3 shows a PCD cutting tool before and after being coated with a 40 nm thick Au thin film using the sputtering method.

Applying a conductive coating to the non-conductive PCD cutting tools results in the cutting edge being covered up. This offsets the electrical breakdown location away from the cutting edge by the thickness of the conductive coating. Therefore, the thickness of the coating must be accounted for when setting up the WCS to find the relative distance between the cutting edge and the workpiece. Figure 4 shows an AFM measurement of the step height for a 30 nm thick Pt coating, as reported by the sputtering machine. The actual step height measured by the AFM was 32 nm. On average, the measured film thickness was 2 nm thicker than the reported film thickness from the sputtering machine.

Similar to the method for making a non-conductive cutting tool electrically conductive, the same coating process can be applied to a non-conductive workpiece to form an electrically conductive surface on the workpiece. The purpose of this coating is to facilitate electrical breakdown on the workpiece surface to set up the WCS. Like the setup process for scanning electron microscopy on non-conductive materials, the workpiece would need to be coated before it can be set up on the machine tool. The coating is not intended to change the material properties of the workpiece, and it will be removed during the machining process.

The sputtering machine was used to apply a 50 nm thick Pt coating to a polyoxymethylene (acetal) workpiece. Platinum was chosen as the coating material for its superior adhesion properties and its chemical resistance. The workpiece was first machined on the ultra-precision machine tool using the scribing process to produce a small, flat surface for the electrical breakdown measurements. After machining, the workpiece was coated with 50 nm of Pt in the sputtering machine. The workpiece was then returned to the machine tool and wired into the electrical breakdown circuit. Before and after pictures of the acetal workpiece can be seen in Fig. 5.

A linear trend was observed for the 1–5 V applied voltage which correlates with a breakdown gap of 250–450 nm, as shown in Fig. 6. This linear trend is observable for both coating materials and all workpiece material combinations with an electrical breakdown field strength of approximately 25 V/µm. The electrical breakdown gap length relationship between sequential measurements was shown to be stable with a standard deviation from 9–62 nm, depending on the applied voltage which has a positive correlation with standard deviation.

Each electrical breakdown test used a 0.5 mm nose radius PCD tool with a 40 nm Pt coating and was limited to an applied voltage range of 1–5 V. The damage caused by electrical breakdown with a coated PCD tool was indistinguishable from other surface features on the workpiece. In this case, electrical breakdown damages were not observable on the workpiece surface. Figure 8 shows a 6061 aluminum workpiece that was intentionally indented with a 0.5 mm nose radius PCD tool at various depths. These indentations can be compared with the areas where electrical breakdown occurred to verify that no contact was made between the cutting tool and workpiece. When comparing Fig. 7 and Fig. 8, it can be shown that electrical breakdown damages are less severe than indentations up to 20 nm deep in the workpiece.

In considering damage caused by electrical breakdown, it is important to look at damages that occur on the cutting tool tip where the electrical breakdown occurs. SEM images were taken of a PCD cutting tool with a 40 nm thick coating to observe how electrical breakdown affects the coating. Figure 9 (a) show the 0.5 mm nose radius PCD cutting tool with a 40 nm Pt coating after conducting the two electrical breakdown measurements at 4 V. Figure 9 (b) shows a different section of the same tool where electrical breakdown did not occur. The cutting edge and surrounding area are almost indistinguishably similar. This shows that electrical breakdown has a minimal effect on the conductive coating used on the PCD cutting tools.

The application of electrical breakdown to non-conductive workpiece materials is also explored. The conductive thin film coating follows the same process as the conductive coatings applied to the PCD cutting tools. Since the workpiece was machined on the ROBONANO, removed to apply the Pt coating, and replaced on the ROBONANO, the electrical breakdown gap length could not be accurately calculated due to tilting of the workpiece when it was replaced after the coating process. Therefore, only the repeatability of electrical breakdown measurements and workpiece surface damage will be discussed. Two cutting tools were used in this experiment: a 0.5 mm nose radius PCD tool with a 40 nm thick Pt coating and a 0.4 mm nose radius WC tool. Both cutting tools showed a similarity when using an applied voltage of 4 and 5 V, as can be seen in Table 1. At a higher applied voltage, the workpiece coating was melted, and the tool indented the workpiece before electrical breakdown could be measured. On average, the electrical breakdown measurements had a repeatability 2–3 times larger than the electrical breakdown measurements on an electrically conductive workpiece. This is likely due to the amount of surface damage that occurs on the Pt coated acetal workpiece.

Table 1

Electrical breakdown position repeatability for a Pt coated acetal workpiece
EB Position Repeatability (nm)
Tool Type	2V	3V	4V	5V
Pt/PCD	77	168	148	N/A
WC	64	115	N/A	N/A

Electrical breakdown damage caused by a Pt coated PCD cutting tool can be seen in Fig. 10. The 3 V and 4 V damages caused by the Pt coated PCD tool protrude from the surface of the workpiece while the damages caused by the WC tool are mostly flat or sunken. AFM measurements showed the WC tool damages were less than 100 nm deep while the Pt coated PCD tool damages were from 0 to 1000 nm protrusions. The damage caused by electrical breakdown on the Pt coated acetal workpiece is expected to be greater than the damage on an electrically conductive bulk material due to the fragile nature of thin films. One explanation for the increased surface damage as compared to the surface damage observed on bulk material electrical breakdown is material migration from the electrical breakdown. Since the coating is a relatively weak bond compared to bulk material, the material migration from anode to cathode caused by field emission will have a more pronounced effect, as shown by the protruding damages. Another primary damage mechanism is Joule heating. The equation for Joule heating is shown in Eq. 3

$$P=I\varDelta V$$

where P is power generated, I is the current, and ΔV is the voltage difference between the anode and cathode. For an applied voltage of 2 V and an electrical breakdown time of 3 ms, 0.07 mJ of energy is generated. The 3 ms electrical breakdown time is the duration that electrical breakdown current was allowed to flow by using an automated system to retract the tool away from the workpiece after electrical breakdown was measured. This number was the worst-case scenario from a 0–3 ms high speed skip delay range, as reported in the ROBONANO α-0iB user manual. In contrast, the energy required to melt a 50 nm thick 10 µm diameter cylinder of Pt, as shown in Fig. 10 is only 0.03 mJ. This number was calculated using specific heat, melting temperature, and heat of fusion of Pt. The energy generated from a 2 V electrical breakdown is more than double the energy required to melt a 10 µm diameter circle of Pt which shows that joule heating could be a primary damage mechanism by melting the coating materials. These two theories are supported by the SEM images shown in Fig. 10. The electrical breakdown damages are surrounded by a black outline with some black spots on the damage marks. In SEM images, black areas are generally a result of no electrically conductive material. For this case, it shows that the electrically conductive Pt coating was melted and vaporized, or the material migrated to the cutting tool during electrical breakdown.

Automated WCS setting would benefit UPM where manual setup can take several hours. In addition, an automated method can eliminate additional uncertainty from the WCS setting process by reducing operator errors. This section addresses the automation features built into the machine tool controller and how the electrical breakdown circuit can be combined to automate WCS setting in ultra-precision machining.

The ultra-precision machine tool used in this research is equipped with a FANUC Series 30i controller. The controller provides a ‘High Speed Skip’ (HSS) sensor and it functions as a switch. Since the HSS sensor acts as a simple switch and it has open connections, the electrical breakdown circuit can be easily wired into the HSS sensor in the machine tool CNC controller. As isolating the electrical breakdown voltage from the CNC controller was an important safety consideration to avoid damaging the CNC controller, an optocoupler was used to separate the two sides of the circuit. When electrical breakdown occurs, the optocoupler is triggered which will connect the two sides of the HSS sensor to stop the linear movement. Figure 11 shows the printed circuit board (PCB) used for the automated electrical breakdown WCS setting method circuit.

The automated axial WCS setting experiment consisted of the cutting tool moving down in the Y-axis direction until electrical breakdown triggers the HSS sensor to stop the linear movement. Feed rates between 0.1 and 1 mm/min were tested in combination with applied voltages of 2–5 V. A 0.5 mm nose radius PCD tool with a 40 nm thick Pt coating was cutting tool and 6061 aluminum was the chosen workpiece material for the experiment.

Slow approach speeds of 0.1 mm/min and 0.25 mm/min and low applied voltages of 2–4 V were tested to avoid damaging the 40 nm thick Pt coating. The automated electrical breakdown axial WCS setting method with a Pt coated PCD tool follows the two expected trends as shown in Fig. 12. The higher feed rate results in a smaller gap between the cutting tool and workpiece, and electrical breakdown gap length increases with applied voltage. Measurement repeatability for the Pt coated PCD tool was 11–43 nm at an applied voltage of 2–4 V.

The automated WCS setting tests with a Pt coated PCD cutting tool did not leave any distinguishable surface damage on the workpiece. It is expected that the Pt tools create less surface damage due to the lower electrical breakdown field strength. It is important to note that no contact marks were observed on the workpiece for either cutting tools. This shows that the electrical breakdown circuit and HSS signal can stop the cutting tool movement even though electrical breakdown is only measured 250–400 nm above the workpiece surface.

The goal of this research was to continue development of a work coordinate system (WCS) setting method using electrical breakdown in ultra-precision machining (UPM). Preliminary research was conducted to show the feasibility of electrical breakdown WCS setting with an electrically conductive cutting tool and workpiece [21]. Many UPM applications use non-conductive workpiece and cutting tools which would not be compatible with the electrical breakdown WCS setting method. This study expands the use of electrical breakdown WCS setting to non-conductive cutting tools and non-conductive workpiece materials.

Non-conductive polycrystalline diamond (PCD) cutting tools were coated with a thin conductive film using the sputtering process. The thin film coating acted as a temporary conductor to facilitate electrical breakdown. After the electrical breakdown measurements, the thin film coating was worn away during the cutting process with no effect to the cutting tool. Pt and Au films of 40 nm thick were tested. It was shown that the combination of thin film coating material and workpiece material was not a significant influence on electrical breakdown. The electrical breakdown WCS setting method using a PCD tool with an electrically conductive thin film was shown to have an average standard deviation of 30 nm. Repeatability shared a positive correlation with applied voltage and ranged from 10–60 nm for 1–5 V.

Conductive material coating method was tested to enable electrical breakdown on non-conductive workpiece materials. The method uses a 50 nm thick conductive film coating, similar to the non-conductive cutting tool application. Minimal workpiece damage was observed but the conductive coating method may require a chemical bath to remove any residual thin film coating that was not removed during machining. The method showed a good repeatability less than 100 nm for a low applied voltage when using a WC cutting tool and a Pt coated PCD tool.

Lastly, the study proposed a system to automate WCS setting in an ultra-precision machine tool. The automation was accomplished by creating a simple electrical circuit that combines the electrical breakdown circuit with the high speed skip (HSS) sensor in the machine tool controller. The WCS setting methods achieved a repeatability of 40 nm.

Funding

Authors gratefully acknowledge the help of kind support from the FANUC Corporation, Japan, for the donation of the ROBONANO α-0iB, one of the latest ultra-precision machine tool, to MIN LAB at UW-Madison. Sangjin Maeng has received a new faculty research fund from Hongik University.

Competing Interests

The authors have no relevant financial or non-financial interests to disclose.

Author Contributions

All authors have contributed to the study conception and research development. Zach Lowery performed material preparation, experiment, and data analysis. Zach Lowery and Sangjin Maeng wrote the draft of the manuscript and Sangkee Min reviewed the manuscript. All authors proofread and approved the final manuscript.

Zhang S, Zhou Y, Zhang H, Xiong Z, To S. Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications. Int J Mach Tools Manuf 2019;142:16–41. https://doi.org/10.1016/j.ijmachtools.2019.04.009
Abdulkadir LN, Abou-El-Hossein K, Jumare AI, Odedeyi PB, Liman MM, Olaniyan TA. Ultra-precision diamond turning of optical silicon—a review. Int J Adv Manuf Technol 2018;96:173–208. https://doi.org/10.1007/s00170-017-1529-x
Brinksmeier E, Gläbe R, Osmer J. Ultra-Precision Diamond Cutting of Steel Molds. CIRP Ann 2006;55:551–4. https://doi.org/10.1016/S0007-8506(07)60480-6
Ruibin X, Wu H. Study on cutting mechanism of Ti6Al4V in ultra-precision machining. Int J Adv Manuf Technol 2016;86:1311–7. https://doi.org/10.1007/s00170-015-8304-7
Schneider F, Das J, Kirsch B, Linke B, Aurich JC. Sustainability in Ultra Precision and Micro Machining: A Review. Int J Precis Eng Manuf-Green Technol 2019;6:601–10. https://doi.org/10.1007/s40684-019-00035-2
Zareena AR, Veldhuis SC. Tool wear mechanisms and tool life enhancement in ultra-precision machining of titanium. J Mater Process Technol 2012;212:560–70. https://doi.org/10.1016/j.jmatprotec.2011.10.014
Yuan ZJ, Zhou M, Dong S. Effect of diamond tool sharpness on minimum cutting thickness and cutting surface integrity in ultraprecision machining. J Mater Process Technol 1996;62:327–30. https://doi.org/10.1016/S0924-0136(96)02429-6
Zhang R, Wang YP. On-Machine Measurement System Implemented Based on Fanuc CNC System Using a Touch Trigger Probe. Adv Mater Res 2014;1016:3–7. https://doi.org/10.4028/www.scientific.net/AMR.1016.3
Renishaw: Small VMC - High accuracy. Renishaw n.d. http://www.renishaw.com/en/preferred-high-accuracy-probe-for-small-vmcs--9499. Accessed October 9, 2021
Workpiece Touch Probes n.d. https://www.heidenhain.com/products/touch-probes/workpiece-measurement. Accessed November 28, 2021
Min S, Lidde J, Raue N, Dornfeld D. Acoustic emission based tool contact detection for ultra-precision machining. CIRP Ann 2011;60:141–4. https://doi.org/10.1016/j.cirp.2011.03.079
Uhlmann E, Raue N, Gabriel C. Acoustic Emission-based micro milling tool contact detection as an integrated machine tool function. Proc 13th Int EUSPEN Conf 2013:152–5.
Bourne KA, Jun MBG, Kapoor SG, DeVor RE. An Acoustic Emission-Based Method for Determining Contact Between a Tool and Workpiece at the Microscale. J Manuf Sci Eng 2008;130:031101. https://doi.org/10.1115/1.2917285
Yoshioka H, Shinno H, Sawano H, Tanigawa R. Monitoring of distance between diamond tool edge and workpiece surface in ultraprecision cutting using evanescent light. CIRP Ann 2014;63:341–4. https://doi.org/10.1016/j.cirp.2014.03.129
Gandarias E, Dimov S, Pham DT, Popov K, Lizarralde R, Arrazola PJ. New methods for tool failure detection in micromilling. Proc Inst Mech Eng Part B J Eng Manuf 2006;220:137–44. https://doi.org/10.1243/095440506X77562
Castaño F, Toro RM del, Haber RE, Beruvides G. Conductance sensing for monitoring micromechanical machining of conductive materials. Sens Actuators Phys 2015;232:163–71. https://doi.org/10.1016/j.sna.2015.05.015
Popov K, Dimov S, Ivanov A, Pham DT, Gandarias E. New tool-workpiece setting up technology for micro-milling. Int J Adv Manuf Technol 2010;47:21–7. https://doi.org/10.1007/s00170-009-2055-2
Bono MJ, Seugling RM, Kroll JJ, Nederbragt WW. An uncertainty analysis of tool setting methods for a precision lathe with a B-axis rotary table. Precis Eng 2010;34:242–52. https://doi.org/10.1016/j.precisioneng.2009.06.003
Kimoto A, Tsuji S, Shida K. Noncontact Material Identification and Distance Measurement Using Effective Capacitance With CdS Cells. IEEE Sens J 2007;7:1440–6. https://doi.org/10.1109/JSEN.2007.904856
Wang D-C, Chou J-C, Wang S-M, Lu P-L, Liao L-P. Application of a Fringe Capacitive Sensor to Small-Distance Measurement. Jpn J Appl Phys 2003;42:5816–20. https://doi.org/10.1143/JJAP.42.5816
Maeng S., Min S. "Work Coordinate Setup in the Ultra-precision Machine Tool Using Electrical Breakdown." International Journal of Precision Engineering and Manufacturing (2023): 1-9. https://doi.org/10.1007/s12541-023-00779-7
Meek JM. Electrical breakdown of gases. United States: John Wiley and Sons, Ltd; 1978
Loeb LB. The theory of the electrical breakdown of gases at atmospheric pressures. J Frankl Inst 1928;205:305–21. https://doi.org/10.1016/S0016-0032(28)91353-8
Wagner KW. The physical nature of the electrical breakdown of solid dielectrics. J Am Inst Electr Eng 1922;41:1034–44. https://doi.org/10.1109/JoAIEE.1922.6593245
Townsend JS. Electricity in Gases. Oxford, U.K.: Clarendon Press; 1915
Boyle WS, Kisliuk P. Departure from Paschen’s Law of Breakdown in Gases. Phys Rev 1955;97:255–9. https://doi.org/10.1103/PhysRev.97.255
Peschot A, Bonifaci N, Lesaint O, Valadares C, Poulain C. Deviations from the Paschen’s law at short gap distances from 100 nm to 10 μm in air and nitrogen. Appl Phys Lett 2014;105:123109. https://doi.org/10.1063/1.4895630
Torres J-M, Dhariwal RS. Electric field breakdown at micrometre separations in air and vacuum. Microsyst Technol 1999;6:6–10. https://doi.org/10.1007/s005420050166
Slade PG, Taylor ED. Electrical breakdown in atmospheric air between closely spaced (0.2 /spl mu/m-40 /spl mu/m) electrical contacts. IEEE Trans Compon Packag Technol 2002;25:390–6. https://doi.org/10.1109/TCAPT.2002.804615
Wallash AJ, Levit L. Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps. Reliab. Test. Charact. MEMSMOEMS II, vol. 4980, SPIE; 2003, p. 87–96. https://doi.org/10.1117/12.478191

Download PDF

Journal Publication

published 05 Oct, 2023

Read the published version in The International Journal of Advanced Manufacturing Technology →

Reviewers agreed at journal
09 Jun, 2023
Reviewers invited by journal
05 Jun, 2023
Editor assigned by journal
05 Jun, 2023
First submitted to journal
02 Jun, 2023

You are reading this latest preprint version

Investigation of Work Coordinate System Setting in Ultra-Precision Machining Using Electrical Breakdown for Non-Conductive Materials

Status:

Journal Publication

Version 1

Abstract

Figures

1. Introduction

2. Electrical breakdown

3. Experiment

4. Results and discussion

5. Automated work coordinate setting

6. Conclusion

Declarations

References

Status:

Journal Publication

Version 1