In this study, an experimental design model based on the response surface method (RSM) was performed to identify the effect of optimum silica fume (SF) content on the development of compressive strength and rapid chloride permeability (RCP) of high-performance green concrete (HPGC) containing ultra-fine Palm Oil Fuel Ash (UPOFA). The UPOFA was used in ratios of (0%, 30%, and 60%) as a substitute binder for the mass of cement. SF was substituted by (0%,10, 15 and 20%) of the remaining mass of cement. The RSM with a central composite design (CCD) approach was utilized to optimize the mix design parameters. The results show that the responses (compressive strength and RCP) are influenced by the interaction of UPOFA and SF. Further, the developed models were statistically significant and exhibited a satisfactory correlation value (R2). Thus, the optimal condition was accurately predicted by the RSM method. Consequently, RSM as an optimization technique may be concluded to be a successful method for improving the mixture design. Based on this innovation, SF may expand the use of POFA in the production of green concrete with superior strength and high passive ion resistance. Meanwhile, reducing waste volume and costly power consumption for cement production.