6.1. Photonic chip description and fabrication
The photonic chip is composed of three layers: i) a bottom silicon (Si) substrate, ii) an intermediate cladding of silicon dioxide (SiO2), and iii) a top waveguide layer of a high refractive index material made of either silicon nitride (Si3N4, \(n\) = 2.0) or tantalum pentoxide (Ta2O5, \(n\) = 2.1) (see Fig. 1a). The high refractive index contrast (HIC) between the waveguide materials and the adjacent imaging medium and sample (\(n\approx\) 1.4), allows the confinement and propagation of the excitation light via total internal reflection (TIR), enabling chip-based total internal reflection fluorescence microscopy (chip-TIRFM) (Fig. 1c). Diverse geometries have been previously studied for chip-TIRFM, including slab, rib, and strip waveguides [15]. Here, we chose uncladded strip waveguides with heights ranging from 150 nm to 250 nm and widths varying from 200 µm to 1000 µm (see Fig. 1b).
In this study, we used both Si3N4 and Ta2O5 chips for chip-TIRFM imaging of tissue sections. These were fabricated in distinct places: i) the Si3N4 waveguide chips were manufactured according to CMOS fabrication process at the Institute of Microelectronics Barcelona (IMB-CNM, Barcelona, Spain) as detailed elsewhere [15, 17, 58]; ii) the Ta2O5 chips were manufactured at the Optoelectronics Research Center (ORC, University of Southampton, UK), following the process herewith detailed [59]. Waveguides of 250 nm thickness were fabricated by deposition of Ta2O5 film on a commercially-available 4” Si substrate having a 2.5 µm thick SiO2 lower cladding layer (Si-Mat Silicon Materials, Germany) using a magnetron sputtering system (Plasmalab System 400, Oxford Instruments). The base pressure of the Ta2O5 deposition chamber was kept below 1 x 10− 6 Torr with Ar:O2 flow rates of 20 sccm : 5 sccm and the substrate temperature was maintained at 200°C throughout the deposition process. Photolithography was used to create a photoresist mask for further dry etching to fabricate strip waveguides. First, 1 µm thick positive resist (Shipley, S1813) was coated on top of a 250 nm Ta2O5 film and then prebaked (1 × 30 min) at 90°C. Then, the wafer was placed into a mask aligner (MA6, Süss MicroTec), and illuminated with the waveguide pattern. The Ta2O5 layer, which was not covered with photoresist, was fully etched to obtain strip waveguides of 250 nm height using an ion beam system (Ionfab 300+, Oxford Instruments) fed with argon at a flow rate of 6 SSCM. The process pressure (2.3×10− 4 Torr), beam voltage (500 V), beam current (100 mA), radiofrequency power (500 W), and substrate temperature (15°C) were kept constant. Finally, the wafers were placed in a 3-zone semiconductor furnace at 600°C in an oxygen environment for 3 hours (in batch) to reduce the stress and supplement the oxygen deficiency created in Ta2O5 during the sputtering and the etching process [23].
Upon reception, the wafers were split into individual chips using a cleaving system (Latticegear, LatticeAx 225). The remaining photoresist layer from the manufacturing process was removed by immersion in acetone (1 × 1 min). The chips were then cleaned in 1% Hellmanex in deionized water on a 70°C hotplate (1 × 10 min), followed by rinsing steps with isopropanol and deionized water. The chips were finally dried with nitrogen using an air blowgun. To improve the adhesion of the tissue sections, the chips were rinsed with 0.1 % w/v poly-L-lysine solution in H2O and let dry in a vertical position (1 × 30 min).
6.2. Sample collection and preparation
6.2.1. Ethical statement
Both animal and human samples were handled according to relevant ethical guidelines. Healthy placental tissues were collected after delivery at the University Hospital of North Norway. Written consent was obtained from the participants following the protocol approved by the Regional Committee for Medical and Health Research Ethics of North Norway (REK Nord reference no. 2010/2058-4). Treatment and care of mice and pigs were conducted following the guidelines of the Norwegian Ethical and Welfare Board for Animal Research. Zebrafish experiments were conducted according to Swiss Laws and approved by the veterinary administration of the Canton of Zurich, Switzerland.
6.1.2. Preparation of Tokuyasu sections for chip-based TIRFM, IFON, and SMLM
Human placental and murine (NZBxNZW)F1 kidney tissue samples were cryopreserved following the Tokuyasu method for ultracryotomy described elsewhere [44, 60]. In short, biopsies blocks of approximately 1 mm3 were collected, rinsed in 9 mg/mL sodium chloride, fixed in 8% formaldehyde at 4°C overnight, infiltrated with 2.3M sucrose at 4°C overnight, mounted onto specimen pins, and frozen in liquid nitrogen. Thereafter, the samples were transferred to a cryo-ultramicrotome (EMUC6, Leica Microsystems) and sectioned with a diamond knife into thin slices ranging from 100 nm to 1 µm thickness. The sections were collected with a wire loop containing a 1:1 cryoprotectant mixture of 2% methylcellulose and 2.3 M sucrose and transferred to photonic chips coated with poly-L-lysine and equipped with custom-made polydimethylsiloxane (PDMS) chambers of approximately 130 µm-height [17] (Figure 1b). The samples were stored on Petri dishes at 4°C before subsequent steps.
Diverse staining strategies were employed according to each imaging modality:
i) For Chip-based multicolor TIRFM imaging, human placental sections of 400 nm were direct-labeled for membranes, F-actin, and nuclei as described herewith. First, the cryoprotectant mixture was dissolved by incubating the samples in phosphate-buffered saline (PBS) (3 × 10 min) at 37 °C. Thereafter, the samples were incubated in a 1:2000 solution of CellMask Deep Red in PBS (1 × 15 min) at room temperature (RT) and subsequently washed with PBS (2 × 5 min). Next, the sections were incubated in 1:100 Phalloidin-Atto565 in PBS (1 × 15 min) and washed with PBS (2 × 5 min). Further, the samples were incubated in 1:500 Sytox Green in PBS (1 × 10 min) and washed with PBS (2 × 5 min). Finally, the sections were mounted with #1.5 coverslips using Prolong Diamond and sealed with Picodent Twinsil.
ii) For Chip-based SMLM imaging, mouse kidney cryosections of 400 nm were labeled for membranes and nuclei using CellMask Deep Red and Sytox Green, respectively, following identical concentrations and incubation steps as for the Chip-based multicolor TIRFM imaging To enable photoswitching of the fluorescent molecules, the samples were mounted with a water-based enzymatic oxygen scavenging system buffer as described in previous works [15, 16]. Thereafter, the sections were covered with #1.5 coverslips and sealed with Picodent Twinsil.
iii) For Chip-based IFON imaging, human placental sections of 400 nm were prepared identically to the Chip-based multicolor TIRFM imaging experiment, except for the membrane labeling and subsequent washing steps that were omitted. In all cases, the labeled cryosections were stored at 4°C and protected from light before imaging. Supplementary Information S8 provides a detailed description of the materials and reagents used in this protocol.
6.2.3. Preparation of Tokuyasu sections for chip-based CLEM
For Chip-based CLEM imaging, zebrafish eyes were prepared as described elsewhere [61]. Briefly, 5 days-post-fertilization larvae were euthanized in tricaine and fixed with 4 % formaldehyde and 0.025% glutaraldehyde in 0.1 M sodium cacodylate buffer (1 × 16 h) at 4 °C. Subsequently, eyes were dissected and washed in PBS, placed in 12 % gelatin (1 × 10 min) at 40 °C, and finally left to harden at 4°C. Embedded eyes were immersed in 2.3 M sucrose and stored at 4°C before further storage in liquid nitrogen. Ultrathin sections of 110 nm thickness were obtained with a cryo-ultramicrotome (Ultracut EM FC6, Leica Microsystems) using a cryo-immuno diamond knife (35° - size 2 mm, Diatome). The cryosections were transferred to photonic chips fitted with a PDMS frame and stored at 4 °C before staining. The samples were incubated in PBS (1 × 20 min) at 0 °C, followed by two washing steps in PBS (2 × 2 min) at RT to dissolve the cryoprotectant. Then, the samples were pre-incubated with a blocking solution (PBG) for 5 min, followed by incubation (1 × 45 min) in a 1:50 solution of rabbit anti-Tomm20 in PBG blocking buffer at RT. After several rinsing (6 × 2 sec) and washing (1 × 5 min) in PBG, the specimens were incubated (1 × 45 min) with an Alexa Fluor 647-conjugated secondary donkey anti-rabbit antibody at 1:200 concentration in PBG at RT. For the acting staining, the samples were washed in PBS (6 × 1 min), followed by incubation with Texas Red-X Phalloidin (1 × 10 min) at 1:50 concentration in PBS. After washes in PBS (2 × 5 min), the samples were incubated in a 1:500 solution of Sytox Green nuclear staining in PBS (1 × 10 min), followed by washes in PBS (2 × 5 min), and mounting with a 1:1 mixture of PBS and glycerol (49782, Sigma-Aldrich) and covered with a #1.5 glass coverslip before chip-TIRFM imaging. Supplementary Information S8 provides a detailed description of the materials and reagents used in this protocol
6.3 Chip imaging and processing
6.3.1. Chip-based imaging
The chip-TIRFM setup was assembled using a modular upright microscope (BXFM, Olympus), together with a custom-built photonic chip module as shown in Figure 1c and Supplementary Information S11. A fiber-coupled multi-wavelength laser light source (iChrome CLE, Toptica) was expanded and collimated through an optical fiber collimator (F280APC-A, Thorlabs) to fill the back aperture of the coupling MO (NPlan 50X/NA0.5, Olympus). Typical illumination wavelengths used were l1 = 640 nm, l2 = 561 nm, and l3 = 488 nm. Both the optical fiber collimator and the coupling objective were mounted on an XYZ translation stage (Nanomax300, Thorlabs) fitted with an XY piezo-controllable platform (Q-522 Q-motion, PI) for fine adjustments of the coupling light into the waveguides. The photonic chips were placed on a custom-made vacuum chuck fitted on an X-axis translation stage (XRN25P, Thorlabs) for large-range scanning of parallel waveguides. Fluorescent emission of the samples was achieved via evanescent field excitation upon coupling of the laser onto a chosen waveguide, as detailed elsewhere [15] (Figure 1a,c). Various MO lenses were used to collect the fluorescent signal, depending on the desired FOV, magnification, and resolution (4X/0.1NA, 20X/0.45NA, and 60X/1.2NA water immersion). An emission filter set composed of a long-pass filter and a band-pass filter was used to block out the excitation signal at each wavelength channel (see Supplementary Information S11 for details). The emission signal passed through the microscope’s 1X tube lens (U-TV1X-2, Olympus) before reaching the sCMOS camera image plane (Orca-flash4.0, Hamamatsu). Both the camera exposure time and the laser intensity were adjusted according to the experimental goal. For TIRFM imaging, the camera exposure time was set between 50 ms and 100 ms, and the input power was incrementally adjusted until the mean histogram values surpassed 500 counts. For SMLM, the acquisition time was set to 30 ms while the input power was set to its maximum level to enable photoswitching. Depending on the coupling efficiency, typical input powers were between 10% and 60% for TIRFM imaging, and between 90% to 100% for SMLM imaging. To reduce photobleaching of the fluorescent markers, the image acquisition was sequentially performed from less energetic to more energetic excitation wavelengths. To deal with the anisotropic mode distribution of the multi-mode interference pattern at the waveguide, the coupling objective was laterally scanned at < 1 mm steps over a 50 µm – 200 µm travel span along the input facet of the chip while individual images were taken. Image stacks of various sizes were acquired according to the imaging technique. Typically, 100 – 1000 frames for TIRFM and 30000 – 50000 frames for SMLM. White light from a halogen lamp (KL1600 LED, Olympus) was used for bright-field illumination to identify the regions of interest (ROI) through the collection objective. To reduce mechanical instability, the collection path of the system was fixed to the optical table, while the photonic chip module was placed onto a motorized stage (8MTF, Standa) for scanning across the XY directions. An optical table (CleanTop, TMC) was used as the main platform for the chip-TIRFM setup. Supplementary Information S11 offers a detailed description of the chip-TIRFM setup.
6.3.2. CLEM imaging
After chip-TIRFM imaging, both the coverslip and the PDMS frame were removed and the samples fixed with 0.1% glutaraldehyde. Thereafter, the samples were incubated with methylcellulose followed by centrifugation at 4700 rpm (Heraeus Megafuge 40R, Thermo Scientific) in a falcon tube. After drying (2 × 10 min) at 40 °C on a heating plate, the photonic chips were transferred to an electron beam evaporator (MED 020, Leica Microsystems). The specimen was then coated with platinum/carbon (Pt/C, 10 nm) by rotary shadowing at an angle of 8 degrees [48]. Thereafter, the photonic chips were mounted on a 25 mm Pin Mount SEMclip (#16144-9-30, Ted Pella) and imaged at 4 nm pixel size with a scanning electron microscope (Auriga 40 CrossBeam, Carl Zeiss Microscopy) at a low-accelerating voltage (1.5 keV). Supplementary Information S12 illustrates various steps of SEM imaging on a photonic chip.
6.3.3. Image processing
The acquired frames were computationally processed on the open-source software Fiji [62] according to the desired imaging technique. To obtain diffraction-limited TIRFM images, the image stacks were computationally averaged using the Z Project tool. Thereafter, the averaged images were deconvolved with the DeconvolutionLab2 plugin [63], using a synthetic 2D point spread function (PSF) matching the effective pixel size of the optical system. Lastly, the Merge Channels tool was used to merge and pseudocolor independent averaged channels into a multicolor composite TIRFM image. SMLM images were reconstructed using the thunderSTORM plugin [64]. For CLEM, the acquired TIRFM stacks were first processed with the NanoJ SRRF plugin [65] and then correlated with the EM images using the TrakEM2 plugin [66].