As shown in Fig. 1, the XRD patterns of 3MgO-B2O3-xwt%BCB (x = 2, 4, 6, 8; y = 0) ceramics sintered at the optimum temperature. As x increased from 2 to 8, two major phases, indexed as Mg3B2O6 (JCPDS: 75-1807) and MgO, were detected. The diffraction peaks of MgO slowly decreased and that of Mg3B2O6 gradually enhanced with the increase of x, which indicates that with the increase of BCB content, the decrease of sintering temperature and B2O3 volatilization will induce the increase of Mg3B2O6 content and decrease of MgO content.
SEM images of 3MgO-B2O3-xwt%BCB (x = 2, 4, 6, 8) ceramics with optimum sintering temperature are illustrated in Fig. 2. Dense microstructure was observed. The grains gradually became more homogeneous and denser as x-value increased. The average grain sizes of the ceramics are approximately 1.88 µm (x = 2,1050℃), 2.07 µm (x = 4,1025℃), 1.53 µm (x = 6,975℃) and 1.81 µm (x = 8,950℃). In particular, 3MgO-B2O3-6wt% BCB showed variable grain growth and finer grains at 975 ℃. This indicates that the addition of appropriate BCB sintering aids can refine the grains. In addition, the sintering temperature of 3MgO-B2O3-xwt%BCB (x = 2, 4, 6, 8) ceramics gradually decreased with the increase of x value. A grain boundary melting phenomenon appeared in 3MgO-B2O3-8wt%BCB, indicating the critical role played by BCB as a sintering aid.
The variation curves of ρ, εr, Q×f and τf of 3MgO-B2O3-xwt%BCB (x = 2, 4, 6, 8) ceramics at different sintering temperature are shown in Fig. 3. As shown in Figs. 3 (a) and (c), the bulk density first increased slightly and then decreased with the increase of the sintering temperature. With changing the sintering temperature, the variation of εr is consistent with that of bulk density. The higher the bulk density is, the higher the permittivity is. As x value increased from 2 to 8, the bulk density increased but the value of εr decreased, which may be attributed to the addition of BCB with a low εr (εr ~7.4) [35].
The change of Q×f with sintering temperature for 3MgO-B2O3-xwt%BCB (x = 2, 4, 6, 8) ceramics is similar to that of bulk density, as shown in Fig. 3(d). The Q×f is mainly affected by ceramic densification. Higher density leads to a lower porosity and lower losses. A moderate particle size is associated with higher quality factors and lower grain boundary losses [38]. However, desired moderate particle size cannot be obtained for ceramics at lower sintering temperatures. The bulk density of samples first increased and then decreased with the increase of x, indicating that the addition of appropriate amounts of BCB not only decreased the sintering temperature of ceramics but also resulted in denser ceramic, which are consistent with the analysis of the SEM images, as shown in Fig. 2. The Q×f values of 3MgO-B2O3-xwt%BCB (x = 2, 4, 6, 8) ceramics initially increased to the maximum and then decreased. The optimum sintering temperature gradually decreased as the x increased from 2 to 8. The optimum Q×f increased from 73,674 GHz to 99,008 GHz. With further increase of BCB content, the Q×f decreased to 75,222 GHz. The first increase and then decrease of Q×f can be ascribed to the deterioration of quality factor of 3MgO-B2O3 by the addition of excess BCB.
The 3MgO-B2O3-xwt% BCB (x = 2, 4, 6, 8) ceramics showed good overall performance: εr = 6.64–7.36, Q×f = 73,674 − 99,008GHz, τf = −73.01 to −59.38 ppm/°C. BCB addition could reduce the sintering temperature of 3MgO-B2O3 ceramics from 1,050°C to 950°C. Notably, 3MgO-B2O3-4wt%BCB ceramics sintered at 1,025°C for 4 h exhibited excellent microwave dielectric properties with a εr of 7.36, a Q × f of 99,008 GHz, and a τf of −59.38 ppm/°C. The 3MgO-B2O3-8wt%BCB ceramic sintered at 950°C for 4 h also exhibited excellent microwave properties with a εr of 6.64, a Q × f of 75222 GHz, and a τf of −64.92 ppm/°C.
Figure 4 exhibits the room-temperature XRD patterns of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, and 20) ceramics sintered at their optimum temperatures. The constituent phases of the ceramics are Mg3B2O6 (PDF:038-1475) and MgO complex phases. However, the diffraction peaks of MgO decreased and that of Mg3B2O6 phase increased with the increase of y, indicating that the increase in H3BO3 content not only decreased the sintering temperature but also compensated the boron content of 3MgO-B2O3 ceramics. Therefore, the content of Mg3B2O6 phase gradually increased, while the content of MgO phase gradually decreased, thereby directly affecting the microwave dielectric properties of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, and 20).
Figure 5 shows the SEM and grain size distribution of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15 and 20) ceramics sintered at their optimum temperatures. The images show that the average grain sizes of the ceramics were approximately 1.93 µm (y = 0), 1.64 µm (y = 5), 2.47 µm (y = 10), 1.9 µm (y = 15), and 2.03 µm (y = 20). In particular, the porosity of the ceramic samples became smaller with the increase of H3BO3. The comparison of the grain size of ceramics without and with H3BO3 shows that H3BO3 had an influence on the growth behaviour of this ceramics, showing that the appropriate amount of H3BO3 chould promote the growth of ceramics. The optimum sintering temperatures of ceramics gradually decreased with the increase of y. The optimum sintering temperatures were 1050°C, 1025°C, 1000°C, 975°C, and 975°C for y = 0, 5, 10, 15, and 20, respectively. In particular, the sintering temperature of ceramics decreased to 975°C ceramics and the ceramics achieved higher densities at y = 15. At the same time, the optimum sintering temperature could be reduced with the increase of H3BO3, thus effectively preventing the volatilization of low melting point B2O3. In addition, H3BO3 compensated for the volatilized B2O3, thus allowing more complete growth of ceramics grains.
Figure 6(a) illustrates the bulk density of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, and 20) ceramics as a function of the sintering temperature. Clearly, the bulk density of ceramic first increased and then decreased with the increase of sintering temperature. This phenomenon indicates that the ceramic was effectively sintered denser initially with the sintering temperature increase. Further temperature increase would cause over-sintering of ceramic and resulted in lower density. The bulk density of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, 20) ceramics showed an overall increasing trend with the H3BO3 content increase, which may be attributed to the decrease in porosity, as shown in Fig. 5. As y increased from 5 to 15, the bulk density varids from 3.017 g/cm3 to 3.128 g/cm3, indicating that the addition of appropriate H3BO3 could make the ceramic samples sintered more densely. However, with further increasing x value to 20, the bulk density reached the lowest at ρ of 3.04 g/cm3, which is due to the over-sintering by addition of too much H3BO3.
Figure 6(b) demonstrates the change of τf for 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (0 ≤ y ≤ 20) as a function of temperature. With the sintering temperature increase, τf first decreased and then increased, which is consistent with the variation of Q×f of ceramics. With the increase of y, the τf first increased and then decreased from −94.28 ppm/°C to −53.27 ppm/°C. When y = 20, the τf of 3MgO-B2O3-2wt%BCB-20wt%H3BO3 ceramics remained stable in the range of −60.2 to −53.27 ppm/°C, which allows the microwave electronic components maintaining temperature stability with a nearly zero temperature coefficient of resonance frequency compared to other ceramics.
Figure 6(c) displays the εr of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, and 20) as a function of the sintering temperature. The dielectric constants of ceramic materials are generally closely related to bulk density, phase composition, and crystal structure [39, 40]. εr first increased to the maximum and then decreased with the increase of temperatures. As shown in Fig. 6, the change in εr with temperature is similar to that of Q×f and bulk density. However, as the H3BO3 content increased, the maximum values of dielectric constant for 3MgO-B2O3-2wt%BCB-ywt%H3BO3 ceramics increased first and then decreased (from 6.95 to 7.05 and then to 6.67), which is similar to that of the bulk density of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 ceramics with sintering temperature. The dielectric constant increased with the increase of bulk density. As the bulk density of ceramic increased, the number of active particles inside the ceramic was relatively high, and the dielectric constant increased and vice versa.
Figure 6(d) shows the change of Q×f 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, 20) ceramics vs the sintering temperature. In general, grain size, porosity, second phase, and microcracks are the main factors to affect the Q×f of microwave dielectric ceramics [41–43]. In Fig. 6(d), the Q×f of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, 20) ceramics showed a trend of increasing and then decreasing with the increase of sintering temperature, which is similar to that of the bulk density and relative permittivity. From the analysis of phase structure and microstructure, the microstructure of 3MgO-B2O3-2wt%BCB-ywt%H3BO3 (y = 0, 5, 10, 15, 20) ceramics is clearly relatively denser, and a second phase is present in addition to the main phase 3MgO-B2O3. As y = 15, the ceramics possessed relatively high Q×f and maximum density ρ of 3.128 g/cm3. With increasing the y to 20, the optimum sintering temperature was 975°C. Combined with the XRD analysis, it is found that the Q×f of 3MgO-B2O3-2wt%BCB-xwt%H3BO3 ceramic also reached the maximum value of 113,645 GHz as x increased.The content of the main phase of the ceramic increases as the content of the second phase MgO in the crystal structure decreases.
Table 1 lists the optimum sintering temperature and microwave dielectric properties of 3MgO-B2O3-xwt%BCB-ywt%H3BO3 (where x = 2, 4, 6, and 8; y = 0, 5, 10, 15, and 20) ceramics. The optimum sintering temperature decreased with the increase of BCB content when the value of y was constant. Notably, the sintering temperature of 3MgO-B2O3-8wt%BCB and 3MgO-B2O3-8wt%BCB-5wt%H3BO3 ceramics can be lowered to 925°C (< 961°C, providing the possibility of cofiring with Ag). Both ceramics had high quality factors and low dielectric constants. The microwave dielectric properties of 3MgO-B2O3-8wt%BCB are as follows: εr = 6.47, Q × f = 73,233 GHz, τf = −68.52 ppm/°C. The microwave properties of 3MgO-B2O3-8wt%BCB-5wt%H3BO3 are as follows: εr = 6.64, Q × f = 78,173 GHz, and τf = −57.27 ppm/°C. In addition, the 3MgO-B2O3-2wt%BCB-20wt%H3BO3 ceramic has the highest quality factor of 113,645 GHz at 975°C, a εr of 6.67, and a τf of −53.19 ppm/°C. As observed by XRD, the increase in H3BO3 content not only decreased the sintering temperature but also enhanced the intensity of the diffraction peak for Mg3B2O6, which indicates that Q×f increased with the increase of Mg3B2O6 content. However, when y = 20, the Q×f decreased with the increase of BCB, indicating that although BCB plays the role as sintering aid, it also deteriorates the microwave dielectric properties of 3MgO-B2O3-xwt%BCB-20wt%H3BO3.
Table 1
Optimum sintering temperature and microwave dielectric properties of 3MgO-B2O3 -xwt%BCB-ywt%H3BO3 ceramics
Compound
|
S.T. ( oC)
|
Q×f (GHz)
|
εr
|
τf (ppm/°C)
|
3MgO-B2O3-2wt%BCB
|
1050 oC
|
73,674
|
6.95
|
−68.38
|
3MgO-B2O3-4wt%BCB
|
1025oC
|
99,008
|
7.36
|
−59.38
|
3MgO-B2O3-6wt%BCB
|
975oC
|
69,263
|
6.78
|
−73.01
|
3MgO-B2O3-8wt%BCB
|
950oC
|
75,222
|
6.64
|
−64.92
|
3MgO-B2O3-2wt%BCB-5wt%H3BO3
|
1000oC
|
89,283
|
7.05
|
−61.53
|
3MgO-B2O3-4wt%BCB-5wt%H3BO3
|
975oC
|
69,055
|
6.92
|
−86.84
|
3MgO-B2O3-6wt%BCB-5wt%H3BO3
|
975oC
|
80,260
|
6.65
|
−57.93
|
3MgO-B2O3-8wt%BCB-5wt%H3BO3
|
925oC
|
78,173
|
6.64
|
−57.27
|
3MgO-B2O3-2wt%BCB-10wt%H3BO3
|
1025oC
|
77,819
|
7.04
|
−94.28
|
3MgO-B2O3-4wt%BCB-10wt%H3BO3
|
1000oC
|
72,409
|
6.93
|
−65.74
|
3MgO-B2O3-6wt%BCB-10wt%H3BO3
|
950oC
|
69,740
|
6.8
|
−86.99
|
3MgO-B2O3-8wt%BCB-10wt%H3BO3
|
950oC
|
58,689
|
6.95
|
−62.86
|
3MgO-B2O3-2wt%BCB-15wt%H3BO3
|
975oC
|
73,892
|
9.79
|
−66.80
|
3MgO-B2O3-4wt%BCB-15wt%H3BO3
|
975oC
|
74,136
|
6.95
|
−27.46
|
3MgO-B2O3-6wt%BCB-15wt%H3BO3
|
950oC
|
83,205
|
6.72
|
−65.05
|
3MgO-B2O3-8wt%BCB-15wt%H3BO3
|
900oC
|
63,711
|
6.51
|
−60.79
|
3MgO-B2O3-2wt%BCB-20wt%H3BO3
|
975oC
|
113,645
|
6.67
|
−53.19
|
3MgO-B2O3-4wt%BCB-20wt%H3BO3
|
975oC
|
81,667
|
6.55
|
−50.21
|
3MgO-B2O3-6wt%BCB-20wt%H3BO3
|
950oC
|
74,099
|
6.51
|
−66.98
|
3MgO-B2O3-8wt%BCB-20wt%H3BO3
|
950oC
|
78,401
|
6.53
|
−62.85
|
To investigate whether the 3MgO-B2O3-6wt%BCB-15 wt%H3BO3 and 3MgO-B2O3-8 wt%BCB-5wt%H3BO3 ceramics could reacedt with silver electrodes or not, the two calcined powders were mixed with 20 wt% Ag powder and sintered at 950°C and 925°C for 4 hours, respectively. Figure 7 shows the XRD patterns and backscattered electron diagrams of the samples. The XRD shows that Ag was present as a single phase and the EDS shows that the bright particles in the main ceramic matrix were silver, which further confirms that there is no reaction between the silver and 3MgO-B2O3-8wt%BCB-5wt%H3BO3. All these results evidence the potential application of both ceramics in LTCC technology.