Unraveling the Nature of Sensing in Electrostatic MEMS Gas Sensors
Low Thermal Budget Electrically Active Thick Polysilicon for Post CMOS MEMS-Last Integration
Bones embedded in muscles structure-inspired flexible wide-range multidimensional force sensors
A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption
A modular microfluidic platform to study how fluid shear stress alters estrogen receptor phenotype in ER+ breast cancer cells
In vivo femtosecond laser nanosurgery of cell wall enables patch-clamp on filamentous fungi
An automatic damping-matching method for eliminating 87.64% damping asymmetry of MEMS vibratory gyroscope in rate mode
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams
Cavity-Agnostic Acoustofluidic Functions Enabled by Guided Flexural Waves on a Membrane Acoustic Waveguide Actuator