3.1. X-ray diffraction (XRD) analysis:
Figure 2 shows the X-ray diffraction (XRD) patterns of undoped ZnO (Figure 2.a) and Al-doped ZnO thin film deposited on silicon substrates with concentration (Al: 3 wt. %) is presented on Figure 2.b. The XRD patterns shown in Fig. 2a exhibits several peaks located at 31.75°, 34.44°, 36.30°, 47.01°, 56.95° and 62.96°, corresponding to ZnO at orientations (100), (002), (101), (102), (110) and (103) respectively, with preferential orientation at (100). In addition, we observed that all peaks were in good agreement with the data base of standard ZnO (JCPDSN° 00-005-0664) with space group P63mc [40]. This analysis reveals the existence of a ZnO single-phase with a hexagonal wurtzite structure. The comparison of all XRD patterns of as prepared samples with the ASTM specifications ZnO confirmed that we have only the peaks of ZnO phase in the XRD spectrum. This result suggests that the deposited AZO films are polycrystalline with (002) as preferential orientation located around 34.40° (Fig. 2b). The intensity of the peak (002) increases proportionally with the concentration of Al up to achievement the maximum which is 3 wt% of Al. There is no extra peaks related to Al or secondary phase was observed before and after incorporation of (Al) in the ZnO thin films. This is due to difference in ionic radii of Zn2+ (0.74 Å) and Al3+ (0.54 Å) which it replaces their sites without changing the wurtzite structure of ZnO [41].
The lattice spacing of undoped and Al doped ZnO thin films were calculated using the Bragg’s formula [42]:
$${2\text{d}}_{\text{h}\text{k}\text{l}}\text{s}\text{i}\text{n}{\theta }=\text{n}{\lambda }$$
1
Where (h k l) are Miller indices; dhkl is the lattice spacing; θ is half of Bragg angle; and λ is the wavelength of the target XRD. Further, the lattice parameters (a,c) values calculated from the spectra obtained, determined from relation [43]:
$$\frac{1}{{\text{d}}_{\text{h}\text{k}\text{l}}^{2}}=\frac{{\text{h}}^{2}+{\text{k}}^{2}}{{\text{a}}^{2}}+\frac{{\text{l}}^{2}}{{\text{c}}^{2}}$$
2
The average crystallite size was decreased with increasing Al doping concentration and calculated using the Debye– Scherrer’s formula [32]:
$$\text{D} =\frac{\text{K}.{\lambda }}{{\beta } \text{c}\text{o}\text{s}{\theta }}$$
3
Where: « D » is the crystallite size; « λ » is the wavelength of the incident X-rays used (1.54059Å); « k » is the Scherrer constant; « β » is the full width at half maximum (FWHM) of the diffraction peak and « θ » is half of Bragg angle in degrees. The calculated structural parameters such as the position, FWHM, the lattice parameters "a" and "c", the grain size "D" and the average crystallite sizes are listed in Table 1.
Table 1. XRD parameters of ZnO undoped and Al-doped ZnO (Al: 3 wt. %).
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)
As illustrated in Table 1, it was found that the grain size "D" of the undoped ZnO film is estimated to be 22.62, 20.77 and 41.57 nm according to the (100), (002) and (101) orientation while it is estimated to be 29.60 and 19.63 nm according to the (100) and (002) orientation of the Al doped ZnO thin films, respectively. Consequently, the average crystallite sizes of undoped and Al-doped ZnO (Al: 3 wt. %) were 28.32 nm and 24.61 nm, respectively [45–47]. Hence, the sharp peaks of the Al-doped ZnO (Al: 3 wt. %) film indicated high quality crystal growth, with relatively large crystallites according to the (002) orientation compared to that of undoped ZnO. Also, the values of lattice parameters (a, c) are distinctly show that for 3% Al the "c" parameter decrease while the "a" parameter increase, meaning the good insertion of Al atoms in the substitutionnal Zn sites, as mentioned above.
3.2. Atomic Force Microscopy (AFM) analysis :
Figure 3(a) and Figure 3(b) show typical 3D AFM images for 02 µm x 02 µm scanning of undoped ZnO and Al-doped ZnO (Al: 3 wt. %) semiconductor thin films deposited by dip coating method. It is observed that the Al-doping (Al: 3 wt. %) significantly affect the morphology and rougness of the ZnO films. The surface roughness (Arithmetic Average,Ra and Root Mean Square,Rq) increases from (Ra=1.1, Rq=1.3) to (Ra=2.13, Rq=2.68) with Al-doping concentration. This implies that the films have a smooth surface. It was also observed that the undoped ZnO film tend to form clusters.
It is worth noting that this lowers roughness and smoothness of the surface can assist transmit further light into absorber layer [48].
3.3. Scanning electron microscopy (SEM) analysis:
The morphology of undoped ZnO and doped with 0.2 and 3 wt.% of Al thin films was analysed by Scanning Electronique Microscope (SEM). From Fig. 4, one can see that the surfaces of all films exhibit a wrinkles-like morphology. The wrinkles-like formations are interconnected with each other, and do not have a particular orientation. Additionally, increasing the doping rate causes the morphological change of layers that affect the mechanisms of the nucleation and on wrinkles growth. Their length exceeds 10 µm. The wrinkles-like formations are thinner in the case of ZnO thin film doped with 3 wt% Al. This morphology is similar to that observed by other researchers [49]. Other scientific researchers have also suggested a link between the size of wrinkles and the percentage of dopants [50].
3.4. Optical (UV-vis-NIR) analysis :
Figure 5 shows the optical transmittance versus wavelength spectra of AZO films taken in the wavelength range, 350–1200 nm. As can be seen from Fig. 6, all the films were highly transparent in the visible range (400–700 nm) with a high transmittance. The undoped ZnO films showed an optical transmittance of > 70% while the Al-doped ZnO films with higher dopant concentration (> 1 at.% exhibited slightly high optical transmittance (> 85%) than films with lower doping concentration (≤ 1 at.%) of aluninium. In the present study, the absence of interference peaks in the transmittance spectra might be attributed to low film thickness and small grain size of the grown films [51].
From transmittance measurements can be estimated by the optical band gap considering a direct gap semiconductor. The band gap (Eg) was calculated by using the relation [52, 53]:
$${\left({\alpha }\text{h}\text{v}\right)}^{2}=\text{K}\left(\text{h}\text{v}-{\text{E}}_{\text{g}}\right)$$
4
Where « h » is Planck's constant, « υ » is the frequency of the incident radiation, « K » is a constant and Eg is the band gap energy. The absorption coefficient α could be calculated using equation [54]:
$${\alpha }=\frac{-\text{l}\text{n}\left(\text{T}\right)}{\text{d}}$$
5
Where « T » is the transmittance and « d » is the thickness of the film.
Figure 6 shows the plots of (αhν)2 against (hν) for the undoped and Al-doped ZnO thin films. The energy band gap (Eg) of as prepared samples can be determined by extrapolating the linear part of the straight lines onto the energy axis to reach (αhν) = 0. As can be seen from Fig. 6, Eg (pure ZnO) is equal to 3.09 eV. This value increased slightly with increasing Al doping concentration. The highest optical band gap, 3.26 eV, was achieved in the ZnO thin films doped with 3% Al [49]. The estimated optical band gaps are identical to those reported by several authors; this enables undoped and doped ZnO thin films to be a transparent material and justifies their use as front windows in optoelectronic devices [49, 50, 55].
3.5. Photoluminescence (PL) analysis:
The luminescence emission spectra are shown in Fig. 7 emitted from the samples of undoped and Al-doped ZnO (Al: 0.5, 1, 2 and 3 wt. %) thin films. Under the same conditions in range of 300 to 550 nm, all photoluminescence spectra were performed using He-Cd laser as an excitation source operating (325 nm) at room temperature. In this figure, it can be seen that there are different PL bands, including the Ultraviolet (UV) emission 377 nm, Violet-II emission 436 nm, Blue emission 473 nm and Green emission 518 nm. The intensity of UV emission at ~ 377 nm increased as the Al doping increased up to 2 wt.% and then decreased at 3 wt.% Al. The high intensity of a green emission band at ~ 518 nm was obtained in ZnO:Al (Al: 1, 2 and 3 wt. %) thin films as compared with that of undoped films. Nevertheless, the incorporation of alumunium in ZnO affects the photoluminescence significantly. Also, there are many other emission bands corresponding to the visual field, mainly emanated from some defects such as Zinc interstitial and oxygen deficiency etc [45, 56–61].
3.6. Electrical Properties
The nature of the charge carriers were measured by the hot probe method. Pure and Al doped ZnO exhibits n-type conductivity. Fig. 5 shows the variation of electrical resistivity with different aluminium (Al) concentrations (Al: 0.5, 1, 2, and 3 wt.%). The resistivity decreases with increase in aluminium doping and varied from 54.61 to 04.592 MΩ/□. Increasing the concentration of aluminum leads to an increase in the amount of aluminum atoms and their incorporation into the ZnO thin films, leading to a decrease in sheet resistance [62]. AZO film with the concentration of (Al: 3 wt.%) showed excellent electrical and optical properties with the lowest sheet resistance of 4.59 MΩ/sq and highest values of the optical gap (3.26 eV) and transparency (> 85%), respectively.