Fig 1: Schematic diagram of a single layer of mica
Fig 1 shows the schematic diagram of a single layer of muscovite mica. Muscovite mica consists of five elements, i.e., potassium (K), Aluminium (Al), Silicon (Si), Oxygen(O), and Hydrogen (H). The thickness of the one monolayer is approximately 10 Å (1nm). The upper bound positively charged K atoms form an electrostatic bond with the negatively charged alumino-silicate layer. During ion bombardment, the loosely bound K atoms are mostly sputtered out along with other constituent elements and the negatively charged aluminosilicate attracts environmental hydrocarbon, as reported earlier 1.
Fig 2: (a) 10keV Ar+ ion distribution (b) Energy transferred by Ar+ ions (c) Energy absorbed and (d) vacancy formation of constituent elements of mica.
Fig 3: (a) 10keV O+ ion distribution (b) Energy transferred by O+ ions (c) Energy absorbed and (d) Vacancy formation of constituent elements of mica.
In Fig 2, the intricacies of energy transfer and vacancy formation corresponding to 10 keV Ar-ion bombarded on mica at normal incidence are investigated. Fig 2(a) reveals that the penetration depth of Ar+ ion in mica extends up to approximately 12 nm (full width at half maximum of the distribution), indicating the potential for damage creation across 12 layers of mica from the top surface. Notably, the ion distribution exhibits a maximum (peak) at 12 nm, suggesting the maximum population of the ions at this position. However, Fig 2(b) unveils the maximum energy transfer by the ion at 10 nm. Therefore, the difference between the peak position of the Ar-ion distribution and the energy transfer by the Ar-ion possesses a shift of 2 nm. This indicates that the Ar-ions are populated at 12 nm from the top surface while the maximum energy deposited by ions is at 10 nm from the surface. Hence, this 2.5 nm can be treated as the slowing down distance of Ar-ion on mica.
Further analysis in Fig 2(c) and (d) demonstrate that oxygen atoms play a pivotal role in the Ar-ion-mica interaction, absorbing much of the transferred energy. Although the surface binding energy of silicon atoms are higher compared to other atoms, the oxygen vacancy is higher compared to other atoms. Further, it is evident that the vacancy formation is maximum at shorter distance compared to the energy deposition by ions. In addition, the energy absorbed by the oxygen atoms is largest among other constituent elements. This results in the maximum vacancy formation observed for oxygen atoms. The current findings shed light on the interplay between ion penetration (ion energy loss), energy transfer, and subsequent vacancy formation, offering key insights into the underlying mechanisms of material damage induced by Ar+ ion irradiation on mica.
Fig 4: (a) 10keV Ar+ ion distribution at 85º (b) Energy transferred by Ar+ ions (c) Energy absorbed and (d) Vacancy formation of constituent elements of mica.
Fig 5: (a) 10keV O+ ion distribution at 85º (b) Energy transferred by O+ ions (c) Energy absorbed and (d) Vacancy formation of constituent elements of mica.
Fig 6: (a) Phonon energy produced by (a) 10 keV Ar-ion at normal incidence (b) 10 keV O+ ion at normal incidence (c) 10 keV Ar-ion at grazing incidence (85º) (d) 10 keV O+ ion at grazing incidence(85º).
Fig 7: Ionisation and recoil ionisation energy produced by (a) 10 keV Ar-ion at normal incidence (b) 10 keV O+ ion at normal incidence (c) 10 keV Ar-ion at grazing incidence (85º) (d) 10 keV O+ ion at grazing incidence(85º).
In the case of O+ ion bombardment on mica, a notable shift of 5 nm in peak positions between ion distribution and energy transfer is observed (Fig 3). The penetration depth of oxygen ions reaches approximately 26.92 nm, suggesting damage or defects in nearly 27 layers of mica. Interestingly, in this case also oxygen atoms absorb most of the energy, while hydrogen atoms absorb the least, as depicted in Fig 3(c). The observed vacancy formation by the O-ion is less compared to Ar+ ion bombardment, as illustrated in Fig 3(d).
The energy transfer of an energetic projectile ion remains independent of the incidence angle. However, the penetration depth, or ion range, is influenced by the implantation angle. Consequently, during ion bombardment at grazing incidence, the projectile ions lose the same amount of energy over a shorter distance. This phenomenon leads to a more concentrated defect formation in a narrow region, emphasizing the significance of incidence angle in modulating the spatial distribution of defects induced by ion bombardment. To verify this the distribution and the energy transfer of Ar+ and O+ ions bombarded at near-grazing incidence are presented in Fig 4 and 5, respectively.
Fig 4(a) investigates the distribution of the 10keV Ar-ions bombarded at an angle of 85º. The population of Ar-ions is maximum up to 8 layers, which is 5 layers less compared to normal incidence. The distribution (Fig 4(a)) shows a peak at 3nm, which is much less compared to Ar-ion bombardment at normal incidence (Fig 2(a)). The maximum energy deposited by Ar-ions during grazing incidence, shows a maximum at 0.8 nm, indicating a shift of between the peak of these two distributions (as seen from Fig 4(b)), lesser than the previous case. Like the previous case, the maximum vacancy formation occurred for oxygen atoms is larger due to maximum energy absorbed by oxygen atoms (Fig 4(c) and (d)). However, the amount of vacancy formation is less compared to previous case (Fig 2(c) and (d)).
Further, the distribution of 10keV O-ions indicate that the O-ions are mostly populated over 18 layers of mica (as seen from FHHM of Fig 5(a)). On the other hand, the maximum energy transfer by O-ions occurs upto 4 layers of mica (Fog 5(b)). In similar to other cases, the oxygen vacancy is larger, owing to maximum energy absorbed by O -atoms (Fig 5(c) and (d)). The energy absorbed by the individual atoms and the corresponding vacancy formation is less compared to Ar-ion (Fig 4(c) and (d)).
The formation of vacancy in the solid surface by ion beam irradiation was theoretically proposed by Norgett -Robinson and Torrens, namely the NRT displacement model19. Within the NRT model, no vacancy production occurs under the threshold of Tdam = Ed, where Tdam is the damage energy available after the primary knock of atoms and Ed is the damage energy required to create one Frenkel pair (vacancy-interstitial atom pairs). In case of damage energies above 2.5 Ed, the number of stable Frenkel pairs produced by a PKA with damage energy Tdam is proposed by the NRT model as νNRT = 0.8 Tdam / 2Ed. ……………………………………(1)
The displacement energy is different for different materials and also different for different atoms in a compound. In the case of full cascade SRIM simulation, the Tdam can be estimated by Tdam = Erecoil - Eioniz. These two parameters can easily be obtained by the “E2recoil. Text” and “ionization. Text” file generated by SRIM20–22. Therefore, the damage energy
Tdam = Etot - Eionizi - Eionizr - Ephi = Ephr- Ephi ………………………………………(2)
Here, Etot is the total energy loss, or the energy transferred by the incident ion beam, Eionizi is the ionization energy lost by the incident ion, Ephi is the phonon energy produced by the incident ion, and Ephr is the phonon energy generated by recoil ions. This approximation was proposed by Stoller et.al 23. It is therefore clear that the amount of vacancy formation depends on phonon energy and recoil ionisation energy generated during energy momentum transfer by the projectile ions.
Elements
|
Displacement Energy (eV)
|
Binding Energy(eV)
|
Surface Energy (eV)
|
Sputtering Yield at normal Incidence (atoms/ion)
|
Sputtering Yield at grazing incidence
(atoms/ion)
|
Potassium (K)
|
25
|
3.0
|
0.93
|
0.71
|
4.19
|
Aluminium (Al)
|
25
|
3.0
|
3.36
|
0.37
|
2.75
|
Silicon (Si)
|
25
|
2.0
|
4.7
|
0.32
|
2.49
|
Oxygen (O)
|
28
|
3.0
|
2.0
|
2.20
|
14.63
|
Hydrogen (H)
|
10
|
3.0
|
2.0
|
0.21
|
1.56
|
Table 1: Displacement energy, binding energy, surface energy and sputtering yield of the constituent elements of mica
To quantify the effect of ionisation and phonon energy developed by these two energetic ions, Figs 6 and 7 are presented. In Fig 6, the phonon energy and recoil phonon energy generated by 10keV Ar and O ions at normal and grazing incidence are presented. The phonon energy refers to the energy associated with phonons generated directly by the passage of the projectile ion through the material. Generally, when an energetic ion traverses a material, it creates a trail of excitations, including phonons, electron-hole pairs, and lattice defects. On contrary, the recoil phonon energy refers to the energy transferred to the crystal lattice of a material when an ion collides with an atom within the lattice. The atom recoils due to the collision, leading to the generation of phonons, which are quantized mechanical vibrations of the lattice. The energy associated with these phonons is termed recoil phonon energy. It represents the energy imparted to the lattice by the recoiling atom. It is clear from Fig 6(a)-(d) that during both normal and grazing incidence the recoil phonon energy is greater compared to phonon energy produced by these ions. This implies that Ephr is much greater compared to Ephi, indicating large magnitude of Tdam available for vacancy formation. Furthermore, in compared to oxygen ion the Ephr for Ar-ion is larger for both normal and grazing incidence (From Fig 6), ensuring a more vacancy formation compared to oxygen-ion.
Further, the distribution of ionisation energy and recoil ionisation energy are presented in Fig 7. The ionisation energy refers to the energy required to remove an electron from an atom or molecule by the impact of an incoming ion. When an energetic ion collides with an atom or molecule in a material, it can transfer sufficient energy to remove one or more electrons from the target atom or molecule, leading to ionization. The energy required for this process is known as the ionization energy. The ionization energy depends on factors such as the ionization potential of the target material and the velocity and charge of the incident ion. On the other hand, the recoil ionisation occurs when an energetic ion collides with an atom in a material, transferring energy to the target atom and causing it to recoil. The recoiling atom may acquire sufficient energy to ionize another atom upon collision. This secondary ionization, induced by the recoil of the primary ion, is termed recoil ionization. It contributes to the overall ionization process in ion-solid interactions and can play a significant role, especially in materials with low ionization potentials. In case of normal incidence, the quantity (Eionizi -Eionizr) is less for oxygen-ion compared to Ar-ion. However, in case of grazing incidence the reverse phenomenon occurs. This ensures that Ar-ion is more effective in creating vacancy on mica according to equation no 2.
In a nutshell, the Ar+ ion is heavier compared to other ions. The mass of the Ar+ ions is like that of K atoms. Also, the penetration depth of the Ar+ ions is less compared to others. This indicates the transferred energy Etot is confined to a lesser number of layers compared to the other ions. Moreover, due to heavier mass, the recoil ionisation energy (Eionizr) is also less. Due to this, the available energy for creating damage (Tdam) is greater for Ar+ ion bombardment compared to other ions (since the displacement energy is almost similar for all the constituent elements of mica, as seen from table 1). This leads to more vacancy formation compared to other ions. Moreover, the displacement energy for the oxygen atom is larger (28 eV as estimated from SRIM). Hence oxygen vacancy in muscovite mica is greater compared to other elements.