To further explore the machining characteristics of very high-frequency micro-electrical discharge machining (VHF micro-EDM), the range of radio-frequency (RF) power amplifier was expanded to 110 MHz, and the power of the RF power amplifier was also greatly increased up to 91 W. The principle of the VHF pulse generator was discussed in detail, and an electro-thermal model suitable for VHF micro-EDM was established to determine the diameter of the plasma channel and the energy distribution ratio. Experimental studies for VHF micro-EDM were also carried out, and the effects of power and frequency on machining characteristics were then analysed and discussed. The results show that at the same frequency, the higher the power is, the higher the material removal rate (MRR) and the larger the number of discharge craters. At the same power, the MRR and the size of discharge craters both first increase and then decrease with increasing frequency and reach the maximum value at 65 MHz. For the copper workpiece, when the frequency is 110 MHz and the total power of the power amplifier is 8.0 W, 5.6% of the energy is used for the material removal of the workpiece, and the finest processing surface is obtained with the surface roughness Ra=12 nm. The average diameter of the discharge craters is as small as 0.268 μm, and the diameter of the plasma channel is only 0.350 μm. In addition, the effects of different workpiece materials and dielectric fluids are also analysed in this paper.