Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa

doi:10.21203/rs.3.rs-658941/v1

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Research Article

Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa

https://doi.org/10.21203/rs.3.rs-658941/v1

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The investigation of the pressure sensor chip’s design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a membrane has been defined using available technological resources. The pressure sensor chip with an area of 6.15х6.15 mm has an average sensitivity S of 34.5 mV/кPa/V at nonlinearity 2K_NL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 кPa.

Electrical Engineering

Mechanical Engineering

piezoresistive pressure sensor

high sensitivity

temperature error

high mechanical strength

technology upgrading