High-tech industry has become an important position for international competition due to its strong technological innovation capabilities. Green development of the manufacturing industry is an important measure to respond to the profound changes in the global manufacturing industry, and technological innovation is the core force to drive the green development of the manufacturing industry. However, DEA model usually employed to measure the efficiencies of the innovation and green development, the internal transmission mechanism has not been thoroughly explored. In order to open the black box, this paper utilize the high-tech industry data to measure the efficiency of technological innovation process by using network Slack Based Measure (NSBM), Global Malmquist Luenberger index model (GML) is employed to evaluate and decompose the green development efficiency of high-tech industry, and the influencing mechanism between the efficiency of technological innovation and the efficiency of green development is explored by the spatial Dubin model. The results indicate that green transformation of the manufacturing industry has an obvious spatial linkage effect. In addition, technological innovation efficiency is conducive to the green development efficiency, while economic transformation efficiency and urbanization are not conducive to the green development efficiency.